Pillar Structure having a Non-Planar Surface for Semiconductor Devices

ABSTRACT

A conductive pillar for a semiconductor device is provided. The conductive pillar is formed such that a top surface is non-planar. In embodiments, the top surface may be concave, convex, or wave shaped. An optional capping layer may be formed over the conductive pillar to allow for a stronger inter-metallic compound (IMC) layer. The IMC layer is a layer formed between solder material and an underlying layer, such as the conductive pillar or the optional capping layer.

PRIORITY CLAIM AND CROSS-REFERENCE

This application is a continuation of U.S. patent application Ser. No.13/933,940, titled. “Pillar Structure having a Non-Planar Surface forSemiconductor Devices” filed on Jul. 2, 2013 which is continuation ofU.S. Pat. No. 8,546,945, titled “Pillar Structure having a Non-PlanarSurface for Semiconductor Devices” issued on Oct. 1, 2013, which is adivisional of U.S. Pat. No. 8,318,596, titled “Pillar Structure having aNon-Planar Surface for Semiconductor Devices” issued on Nov. 27, 2012,which are hereby incorporated by reference.

BACKGROUND

This disclosure relates generally to semiconductor devices and moreparticularly, to pillar structures having a non-planar surface forsemiconductor devices.

The past few decades have seen many shifts in electronics andsemiconductor packaging that have impacted the entire semiconductorindustry. The introduction of surface-mount technology (SMT) and ballgrid array (BGA) packages were generally important steps forhigh-throughput assembly of a wide variety of integrated circuit (IC)devices, while at the same time allowing for reduction of the pad pitchon the printed circuit board. Conventionally packaged ICs have astructure basically interconnected by fine gold wire between metal padson the die and electrodes spreading out of molded resin packages. DualInline Package (DIP) or Quad Flat Package (QFP) are fundamentalstructures of current IC packaging. However, increased pin countperipherally designed and arranged around the package typically resultsin too short of a pitch of lead wire, yielding limitations in boardmounting of the packaged chip.

Chip-scale or chip-size packaging (CSP) and BGA packages are just someof the solutions that enable dense electrode arrangement without greatlyincreasing the package size. Some CSP techniques may provide theadditional advantage of allowing for wafer packaging on a chip-sizescale. CSP typically results in packages within 1.2 times the die size,which greatly reduces the potential size of devices made with the CSPmaterial.

Some CSP or BGA packages rely on bumps of solder to provide anelectrical connection between contacts on the die and contacts on asubstrate, such as a packaging substrate, a printed circuit board (PCB),another die/wafer, or the like. Other CSP or BGA packages utilize asolder ball or bump placed onto a bump electrode or pillar, relying onthe soldered joint for structural integrity. The different layers makingup the interconnection typically have different coefficients of thermalexpansion (CTEs). As a result, a relatively large stress derived fromthis difference is exhibited on the joint between the post and the bumpelectrode, which often causes cracks to form in the bonding area betweenthe bump electrode/pillar and the solder ball or bump.

BRIEF DESCRIPTION OF THE DRAWINGS

For a more complete understanding of the embodiments, and the advantagesthereof, reference is now made to the following descriptions taken inconjunction with the accompanying drawings, in which:

FIGS. 1-7 illustrate various intermediate stages of a method of formingsemiconductor device having uneven pillars in accordance with anembodiment; and

FIGS. 8 a and 8 b illustrate other shapes of pillars that may be used inaccordance with other embodiments.

DETAILED DESCRIPTION

The making and using of the embodiments of the disclosure are discussedin detail below. It should be appreciated, however, that the embodimentsprovide many applicable inventive concepts that can be embodied in awide variety of specific contexts. The specific embodiments discussedare merely illustrative of specific ways to make and use theembodiments, and do not limit the scope of the disclosure.

Embodiments described herein relate to the use of a conductive pillarfor use with semiconductor devices. As will be discussed below,embodiments are disclosed that utilize a conductive pillar for thepurpose of attaching one substrate to another substrate, wherein eachsubstrate may be a die, wafer, printed circuit board, packagingsubstrate, or the like, thereby allowing for die-to-die, wafer-to-die,wafer-to-wafer, die or wafer to printed circuit board or packagingsubstrate, or the like. While embodiments may be utilized with anypillar size, it has been found that embodiments may be particularlyuseful for smaller pillar sizes, e.g., pillar sizes less than about 80μm. Throughout the various views and illustrative embodiments, likereference numerals are used to designate like elements.

FIGS. 1-7 illustrate various intermediate stages of a method of forminga semiconductor device having uneven pillars in accordance with anembodiment. Referring first to FIG. 1, a portion of a substrate 102having electrical circuitry 104 formed thereon is shown in accordancewith an embodiment. The substrate 102 may comprise, for example, bulksilicon, doped or undoped, or an active layer of asemiconductor-on-insulator (SOI) substrate. Generally, an SOI substratecomprises a layer of a semiconductor material, such as silicon, formedon an insulator layer. The insulator layer may be, for example, a buriedoxide (BOX) layer or a silicon oxide layer. The insulator layer isprovided on a substrate, typically a silicon or glass substrate. Othersubstrates, such as a multi-layered or gradient substrate may also beused.

Electrical circuitry 104 formed on the substrate 102 may be any type ofcircuitry suitable for a particular application. In an embodiment, theelectrical circuitry 104 includes electrical devices formed on thesubstrate 102 with one or more dielectric layers overlying theelectrical devices. Metal layers may be formed between dielectric layersto route electrical signals between the electrical devices. Electricaldevices may also be formed in one or more dielectric layers.

For example, the electrical circuitry 104 may include various N-typemetal-oxide semiconductor (NMOS) and/or P-type metal-oxide semiconductor(PMOS) devices, such as transistors, capacitors, resistors, diodes,photo-diodes, fuses, and the like, interconnected to perform one or morefunctions. The functions may include memory structures, processingstructures, sensors, amplifiers, power distribution, input/outputcircuitry, or the like. One of ordinary skill in the art will appreciatethat the above examples are provided for illustrative purposes only tofurther explain applications of some illustrative embodiments and arenot meant to limit the disclosure in any manner. Other circuitry may beused as appropriate for a given application.

Also shown in FIG. 1 is an inter-layer dielectric (ILD) layer 108. TheILD layer 108 may be formed, for example, of a low-K dielectricmaterial, such as phosphosilicate glass (PSG), borophosphosilicate glass(BPSG), fluorinated silicate glass (FSG), SiO_(x)C_(y), Spin-On-Glass,Spin-On-Polymers, silicon carbon material, compounds thereof, compositesthereof, combinations thereof, or the like, by any suitable method knownin the art, such as spinning, chemical vapor deposition (CVD), andplasma-enhanced CVD (PECVD). It should also be noted that the ILD layer108 may comprise a plurality of dielectric layers.

Contacts, such as contacts 110, are formed through the ILD layer 108 toprovide an electrical contact to the electrical circuitry 104. Thecontacts 110 may be formed, for example, by using photolithographytechniques to deposit and pattern a photoresist material on the ILDlayer 108 to expose portions of the ILD layer 108 that are to become thecontacts 110. An etch process, such as an anisotropic dry etch process,may be used to create openings in the ILD layer 108. The openings may belined with a diffusion barrier layer and/or an adhesion layer (notshown), and filled with a conductive material. In an embodiment, thediffusion barrier layer comprises one or more layers of TaN, Ta, TiN,Ti, CoW, or the like, and the conductive material comprises copper,tungsten, aluminum, silver, and combinations thereof, or the like,thereby forming the contacts 110 as illustrated in FIG. 1.

One or more inter-metal dielectric (IMD) layers 112 and the associatedmetallization layers (not shown) are formed over the ILD layer 108.Generally, the one or more IMD layers 112 and the associatedmetallization layers are used to interconnect the electrical circuitry104 to each other and to provide an external electrical connection. TheIMD layers 112 may be formed of a low-K dielectric material, such as FSGformed by PECVD techniques or high-density plasma CVD (HDPCVD), or thelike, and may include intermediate etch stop layers. Contacts 114 areprovided in the uppermost IMD layer to provide external electricalconnections.

It should also be noted that one or more etch stop layers (not shown)may be positioned between adjacent ones of the dielectric layers, e.g.,the ILD layer 108 and the IMD layers 112. Generally, the etch stoplayers provide a mechanism to stop an etching process when forming viasand/or contacts. The etch stop layers are formed of a dielectricmaterial having a different etch selectivity from adjacent layers, e.g.,the underlying semiconductor substrate 102, the overlying ILD layer 108,and the overlying IMD layers 112. In an embodiment, etch stop layers maybe formed of SiN, SiCN, SiCO, CN, combinations thereof, or the like,deposited by CVD or PECVD techniques.

A protective layer 116, such as a dielectric material, may be formed andpatterned over the surface of the uppermost IMD layer 112 to form anopening over the contacts 114 and to protect the underlying layers fromvarious environmental contaminants. Thereafter, a conductive layer 118is formed and patterned over the protective layer 116. The conductivelayer 118 provides an electrical connection upon which contact bumps maybe formed for external connections. The conductive layer 118 may alsoact as a redistribution layer (RDL) to provide a desired pin or balllayout. The conductive layer 118 may be formed of any suitableconductive materials, such as copper, tungsten, aluminum, silver, andcombinations thereof, or the like.

A passivation layer 120, such as a dielectric layer, is formed andpatterned over the conductive layer 118 as illustrated in FIG. 1. Thepassivation layer 120 may be formed of any suitable method, such as CVD,PVD, or the like. In an embodiment, the passivation layer 120 has athickness of about 1.5 um to about 1.9 um.

Any suitable process may be used to form the structures discussed aboveand will not be discussed in greater detail herein. As one of ordinaryskill in the art will realize, the above description provides a generaldescription of the features of the embodiment and that numerous otherfeatures may be present. For example, other circuitry, liners, barrierlayers, under-bump metallization configurations, and the like, may bepresent. The above description is meant only to provide a context forembodiments discussed herein and is not meant to limit the disclosure orthe scope of any claims to those specific embodiments.

FIG. 2 illustrates a barrier layer 210 deposited over the surface of thepassivation layer 120. The barrier layer 210 is a thin layer of aconductive material that aids in the formation of a thicker layer duringsubsequent processing steps. In an embodiment, the barrier layer 210 maybe formed by depositing one or more thin conductive layers, such as oneor more thin layers of Cu, Ti, Ta, TiN, TaN, combinations thereof, orthe like, using CVD or physical vapor deposition (PVD) techniques. Forexample, in an embodiment a layer of Ti is deposited by a PVD process toform a diffusion barrier film and a layer of Cu is deposited by a PVDprocess to form a Cu seed layer. It should be noted that an optionalpolyimide layer (not shown) may be formed, for example, between thepassivation layer 120 and the barrier layer 210.

Thereafter, as illustrated in FIG. 3, a patterned mask 310 is formedover the seed layer 210 in accordance with an embodiment. The patternedmask 310 defines the lateral boundaries of the conductive pillar to besubsequently formed as discussed in greater detail below. The patternedmask 310 may be a patterned photoresist mask, hard mask, a combinationthereof, or the like.

FIG. 4 illustrates the formation of a conductive pillar 410 inaccordance with an embodiment. The conductive pillar 410 may be formedof any suitable conductive material, including Cu, Ni, Pt, Al,combinations thereof, or the like, and may be formed through any numberof suitable techniques, including PVD, CVD, electrochemical deposition(ECD), molecular beam epitaxy (MBE), atomic layer deposition (ALD),electroplating, and the like. In an embodiment, the conductive pillar410 has a thickness between about 30 μm and about 60 μm.

The conductive pillar 410 is formed by a process that results in anuneven surface, such as a concave surface as illustrated in FIG. 4. Inan embodiment, the conductive pillar 410 is formed by an electroplatingprocess wherein the wafer is submerged or immersed in the electroplatingsolution. The wafer surface is electrically connected to the negativeside of an external DC power supply such that the wafer functions as thecathode in the electroplating process. A solid conductive anode, such asa copper anode, is also immersed in the solution and is attached to thepositive side of the power supply. The atoms from the anode aredissolved into the solution, from which the cathode, e.g., the wafer,acquires, thereby plating the exposed conductive areas of the wafer,e.g., exposed portions of the seed layer 210 within the openings of thepatterned mask 310. The additives of the electroplating solution underwhich the electroplating process is performed may be adjusted to achievean uneven surface. For example, to obtain the concave surface asillustrated in FIG. 4, the concentration of the leveler, which is one ofthe additives, may be reduced. The recipes of additives may vary fordifferent solution vendors. Other processes, however, may be used.

FIG. 5 illustrates formation of an optional conductive cap layer 510formed over the conductive pillar 410. As described in greater detailbelow, solder material will be formed over the conductive pillar 410.During the soldering process, an inter-metallic compound (IMC) layer isnaturally formed at the joint between the solder material and theunderlying surface. It has been found that some materials may create astronger, more durable IMC layer than others. As such, it may bedesirable to form a cap layer, such as the conductive cap layer 510, toprovide an IMC layer having more desirable characteristics. For example,in an embodiment in which the conductive pillar 410 is formed of copper,a conductive cap layer 510 formed of nickel may be desirable. Othermaterials, such as Pt, Au, Ag, combinations thereof, or the like, mayalso be used. The conductive cap layer 510 may be formed through anynumber of suitable techniques, including PVD, CVD, ECD, MBE, ALD,electroplating, and the like.

FIG. 6 illustrates formation of solder material 610 and an IMC layer612. In an embodiment, the solder material 610 comprises SnPb, a high-Pbmaterial, a Sn-based solder, a lead-free solder, or other suitableconductive material.

As one of ordinary skill in the art will appreciate, the conductivepillar 410 exhibits a rough, uneven surface. For example, as illustratedin FIG. 4, the conductive pillar 410 is formed in a manner such that theconductive pillar 410 exhibits a concave surface. In an embodiment, thesurface roughness of the conductive pillar 410 is greater than about athickness of the IMC layer 612. It has been found that such a structureas that described above reduces the cracking and/or the propagation ofthe cracks along the IMC layer 612. It is believed that the reduction inthe crack propagation is due to the unevenness of a surface of theunderlying conductive pillar 410, and it is further believed that theIMC layer 612 itself being uneven and having a thickness less than theamount of roughness of the pillar further impedes propagation of acrack. For example, it has been observed that in some embodiments theIMC layer 612 is less than about 6 μm. In these embodiments, it may bedesirable to have a surface roughness of greater than 6 μm, andaccordingly, in FIG. 6, the height H_(d) is greater than about 6 μm. Byhaving this amount of roughness it reduces the possibility of linear, ornear linear, propagation of the cracks. In another embodiment, theheight H_(d) divided by the width D is greater than about 6%.

Additionally, in some embodiments, such as the concave surface such asthat illustrated in FIGS. 4-6, the shape of the conductive pillar allowsthe conductive bump to better hold or restrict the solder to the end ofthe conductive pillar 410, thereby reducing the amount of solder wettingalong sidewalls of the conductive pillar 410, which may result in aweaker IMC interface.

Thereafter, as illustrated in FIG. 7, the patterned mask 310 may beremoved. In embodiments in which the patterned mask 310 is formed fromphotoresist materials, the photoresist may be stripped by, for example,a chemical solution such as a mixture of ethyl lactate, anisole, methylbutyl acetate, amyl acetate, cresol novolak resin, and diazo photoactivecompound (referred to as SPR9), or another stripping process. A cleaningprocess, such as a wet dip in a chemical solution of phosphoric acid(H₃PO₄) and hydrogen peroxide (H₂O₂), referred to as DPP, with 1%hydrofluoric (HF) acid, or another cleaning process, may be performed toremove exposed portions of the seed layer 210 and any contaminants fromthe surface of the passivation layer 120.

Thereafter, a solder reflow process and other back-end-of-line (BEOL)processing techniques suitable for the particular application may beperformed. For example, an encapsulant may be formed, a singulationprocess may be performed to singulate individual dies, wafer-level ordie-level stacking, and the like, may be performed. It should be noted,however, that embodiments may be used in many different situations. Forexample, embodiments may be used in a die-to-die bonding configuration,a die-to-wafer bonding configuration, a wafer-to-wafer bondingconfiguration, die-level packaging, wafer-level packaging, or the like.

It should also be noted that other embodiments may not place the soldermaterial on the conductive pillars 410 prior to attaching the substrate102 to another substrate (not shown). In these other embodiments, thesolder material may be placed on the other substrate and then theconductive pillars 410 on the substrate 102 are brought into contactwith the solder material on the other substrate and a reflow process isperformed to solder the two substrates together.

Additional surfaces that may be used for the conductive pillar areillustrated in FIGS. 8 a and 8 b. Referring first to FIG. 8 a, a convexsurface is created rather than the convex shape discussed above withreference to FIGS. 4-7. In this embodiment, the conductive pillar may beformed by, for example, increasing the concentration of the leveler,which is one of the electroplating solution additives. The recipes ofadditives may vary for different solution vendors. Other processes,however, may be used.

FIG. 8 b illustrates an embodiment in which the surface of theconductive pillar 410 has a wave-type of surface. In this embodiment,the conductive pillar may be formed by, for example, increasing thecurrent density during electroplating. Other processes, however, may beused.

A conductive pillar for a semiconductor device is provided. Theconductive pillar is formed such that a top surface is non-planar. Inembodiments, the top surface may be concave, convex, or wave shaped. Anoptional capping layer may be formed over the conductive pillar to allowfor a stronger inter-metallic compound (IMC) layer. The IMC layer is alayer formed between a solder material and the underlying layer, such asthe conductive pillar or the optional capping layer.

Other embodiments are disclosed.

Although the embodiments and their advantages have been described indetail, it should be understood that various changes, substitutions andalterations can be made herein without departing from the spirit andscope of the embodiments as defined by the appended claims. Moreover,the scope of the present application is not intended to be limited tothe particular embodiments of the process, machine, manufacture, andcomposition of matter, means, methods and steps described in thespecification. As one of ordinary skill in the art will readilyappreciate from the disclosure, processes, machines, manufacture,compositions of matter, means, methods, or steps, presently existing orlater to be developed, that perform substantially the same function orachieve substantially the same result as the corresponding embodimentsdescribed herein may be utilized according to the disclosure.Accordingly, the appended claims are intended to include within theirscope such processes, machines, manufacture, compositions of matter,means, methods, or steps. In addition, each claim constitutes a separateembodiment, and the combination of various claims and embodiments arewithin the scope of the disclosure.

What is claimed is:
 1. A method, comprising: providing a substratehaving a conductive layer; forming a conductive pillar over and inelectrical contact with the conductive layer, the conductive pillarhaving a non-planar upper surface; and applying solder material over thepillar and in electrical contact with the conductive layer; wherein adistance between an uppermost point of the non-planar upper surface anda lowermost point of the non-planar upper surface is greater than about6% of a width of the pillar.
 2. The method of claim 1, wherein thenon-planar upper surface is formed with a convex surface.
 3. The methodof claim 1, wherein the non-planar upper surface is formed with aconcave surface.
 4. The method of claim 1, wherein the non-planar uppersurface is formed with a wave shape.
 5. The method of claim 1, furthercomprising forming a capping layer over the pillar, and wherein thesolder material is formed over the capping layer.
 6. The method of claim5, wherein the capping layer is formed of Ni, Pt, Au, or Ag.
 7. Themethod of claim 6 wherein the capping layer is formed from a firstmaterial selected to form a first inter-metallic compound (IMC)resulting from the solder material and the first material that isstronger than a second IMC resulting from the solder material and asecond material forming the pillar.
 8. The method of claim 1, whereinthe applying the solder material further comprises forming aninter-metallic compound (IMC) layer interposed between the pillar andthe solder material, a thickness of the IMC layer being less than aboutthe distance between the uppermost point of the non-planar upper surfaceand the lowermost point of the non-planar upper surface.
 9. The methodof claim 1, wherein a bottom surface of the solder material has a shapesubstantially corresponding to the non-planar upper surface of thepillar.
 10. A method, comprising: forming a conductive pillar of a firstconductive material over and in electrical contact with a conductivelayer, the conductive pillar having a non-planar upper surface; andaffixing a second conductive material different from the firstconductive material over the non-planar upper surface of the conductivepillar, the second conductive material in electrical contact with theconductive layer; wherein a distance between an uppermost point of thenon-planar upper surface and a lowermost point of the non-planar uppersurface is greater than about 6% of a width of the pillar.
 11. Themethod of claim 10, wherein the second conductive material comprises asolder material.
 12. The method of claim 10, further comprising forminga capping layer on the non-planar upper surface of the pillar, andwherein the second conductive material is affixed over the cappinglayer.
 13. The method of claim 12, wherein the affixing the secondconductive material further comprises forming an inter-metallic compound(IMC) layer interposed between the capping layer and the secondconductive material.
 14. The method of claim 13, wherein the cappinglayer is formed of Ni, Pt, Au, or Ag.
 15. The method of claim 10,wherein the second conductive material has a bottom surface having asubstantially same shape as the non-planar upper surface after theaffixing the second conductive material.
 16. The method of claim 15,wherein the second conductive material has an upper surface with a shapedifferent from the non-planar upper surface after the affixing thesecond conductive material.
 17. The method of claim 10, wherein thenon-planar upper surface is formed having one of a convex shape and aconcave shape.
 18. A method of forming a structure, comprising: forminga pillar of a first conductive material, the pillar having a non-planarupper surface; and applying solder material over the pillar and inelectrical contact with the pillar; wherein a distance between anuppermost point of the non-planar upper surface and a lowermost point ofthe non-planar upper surface is greater than about 6 μm.
 19. The methodof claim 18, further comprising forming a capping layer over the pillar,wherein the applying the solder material forms an first inter-metalliccompound (IMC) layer over the capping layer disposed between the soldermaterial and the capping layer.
 20. The method of claim 19 wherein thecapping layer is formed from a second material selected to result in afirst IMC stronger than a second IMC formed from the first conductivematerial forming the pillar.